SAM 300 / 400 TWIN and QUAD are high performance tools enabling non destructive acoustic investigations for high throughput analysis, quality control and research applications. They feature a new high speed linear motion scanner and new rf and transducer technologies of up to 400 MHz, controlled through a user friendly graphical interface.

A new master/slave concept enables arrays of two or four transducers to acquire simultanous acoustic images.

Built to semiconductor industry standards around a core platform that utilises the latest production and research technology, the SAM TWIN SCAN and QUAD SCAN can accurately handle wafers up to 300 / 400 mm. Ultrasound frequency range up to 500 MHz with transducer from 3 MHz - 400 MHz.

Flexibiliy in scanning range x;y
hnd head design:
200 µmx200µm-320 mm x 320 mm
200µm-200µm-430 mm x 430 mm
Auto focus for each transducer