PVA TePla Analytical Systems GmbH
Scanning Acoustic Microscope SAM 300 W
The SAM Wafer Automation Product Line
AM 300
SAM 300 E
SAM 300
SAM 300 TWIN
SAM 300 QUAD
SAM 400
SAM 400 TWIN
SAM 400 QUAD
SAM 2000
SAM 2000 invert
AUTO WAFER
AUTO TRAY
AUTO INGOT
SAMNALYSIS Software
SAM 300 AUTO WAFER SINGLE/TWIN/QUAD

SAM 300 AUTO WAFER is a product line especially developed for in line production control. It is corresponding to the clean room class down to 10.

The main application is related to bonded wafers (MEMS), detection of voids, inclusions or delaminated areas in bonding interfaces.

Load Port Options
single Open Loadport
single SMIF Loadport
single FOUP Loadport
dual Open Loadport
dual SMIF Loadport
dual FOUP Loadport

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