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| The SAM Wafer Automation Product Line | ||||||||||||||||
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| SAM 300 AUTO WAFER SINGLE/TWIN/QUAD SAM 300 AUTO WAFER is a product line especially developed for in line production control. It is corresponding to the clean room class down to 10. The main application is related to bonded wafers (MEMS), detection of voids, inclusions or delaminated areas in bonding interfaces. |
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