PVA TePla Analytical Systems GmbH
The Product Line for Quality Control of Ingots
AM 300
SAM 300 E
SAM 300
SAM 300 TWIN
SAM 300 QUAD
SAM 400
SAM 400 TWIN
SAM 400 QUAD
SAM 2000
SAM 2000 invert
AUTO WAFER
AUTO TRAY
AUTO INGOT
SAMNALYSIS Software
AUTO INGOT

The AUTO INGOT is an acoustic tomograph for volume inspection of single crystal ingots (Si, Ge, GaAs e.g.), analysis of voids, inclusions, estimation of the depth and size simultaneously. It enables inspection of 5-12 inch Si ingots up to 400 mm thickness and a weight of 75 kg. The defect resolution down to 100 µm voids is possible in Silicon. Investigations of large and heavy parts must be customized according to geometry (load port and scanner).

Scanning Acoustic Microscope Auto Ingot
Scanning Acoustic Microscope Auto Ingot

Products
Components
Principle
Application
Publication