| Customized automated solutions for inline process diagnostic and control | |||||||||||||
|
|||||||||||||
 inline inspection from 2" - 12" Clean room compatibility down to class 10 Integrated data analysis and automation software, fab communication by SECS interface
|
 |
 |
|||||||||||
| Wafer inspection station for wafer handling in water |
High speed robot for wafers up to 300 mm |
||||||||||||
 |
 |
||||||||||||
| Pre-aligner and bar code reader |
Twin scanner with two transducers |
||||||||||||
| Products |
| Components |
| Principle |
| Application |
| Publication |