PVA TePla Analytical Systems GmbH
Company history and technology milestones
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History
Career
1984-1990 Development of first ultra high frequency scanning acoustic microscope "Elsam" at company Ernst Leitz,
Wetzlar (Leica), first system operates up to 2 GHz
1991 First solutions for V(z), V(f) measurements
1994 Foundation of Kraemer Scientific Instruments GmbH in Herborn, continuation of Leica activities in scanning acoustic microscopy
1998 First sapphire transducer for detection of Rayleigh waves based on ZnO piezo layers, designed from
100 MHz - 2 GHz
2004 Foundation of SAMTEC GmbH Aalen as supplier for in line inspection SAM technology
2005 Patent application DE 102006005449 A1 2006.10.12 acoustic auto focus
2005 Patent application DE 102006005448 A1 2006.10.12 for multi channel transducer arrays
2005 Patent application DE 102006032431 A 12007.12.27 for pinhole detection in Si ingots
2007 PVA TePla AG Wettenberg took over all shares of Kraemer Scientific Instruments GmbH Herborn and
SAMTEC GmbH Aalen
2007 Merger of Kraemer Scientific Instruments GmbH Herborn and SAMTEC GmbH Aalen to
PVA TePla Analytical Instruments GmbH Aalen
2009 First fully automated 8”/12”-bridge tool (4 channel system) for wafer inspection
2009 Introduction of fully 3d analytical defect review tool, introduction of HILBERT modules for resolution and
contrast enhancement of SAM images
2009 Introduction of SAMnalysis software of add line and off line analysis of SAM data.

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