SAM Line
The SAM Line offers universal products of scanning acoustic microscopes, applicable in the field of scientific research and quality control in the industrial sector. Our innovative hardware/software-platform allows a universal range of use and assures an easy and uncomplicated modular operation of the machine. We offer a comprehensive selection of hardware-components which enable numerous system configurations. pfeil more

SAM Premium Line
Our SAM Premium Line connects ultrasonic and optical microscopy. This technology allows the combination of the scanner with both an inversive microscope and a reflected-light microscope. The range of frequencies up to 2.000 MHz enables resolution values of acoustic pictures in the µm-range. pfeil more

Auto Wafer Line
Our Auto Wafer Line offers you fully automated ultrasonic microscopes, which can be used for inspections of bonded wafers and MEMS. By using our systems voids, inclusions or delaminated areas in bonding interfaces can be easily identified. An automated defect-review-software allows the fully automated use. The scanning results can also be displayed as klarf-files and VEGA MAP. A GEM/SECS-integration is also offered. pfeil more

SAM Auto Tray Line
The SAM Auto Tray Line offers you fully automated ultrasonic microscopes developed especially for the wafer-inspection of electronic modules and IGBT-modules. This way, voids, inclusions or delaminated areas in bonding interfaces can be easily spotted. A special advantage offered by the use of our products is the possibility of controlling various layers at once. Moreover we provide a fully automated software package for quantitative usage. pfeil more

Auto Ingot
Auto Ingot is a fully automated ultrasonic microscope which allows the examination of single crystal ingots (Si, Ge, GaAs). Especially voids and inclusions can be detected by using our system. pfeil more

Application-specific systems
On customer request we design and provide application specific solutions according to your individual requirements and applications, manual operation or fully-automated.